ECE 871 (Course) - Grade Details

(with breakdown by instructor)

Course Title: Micro-electro-mechanical Systems Fabrication

Course Description: Design, simulation, fabrication and testing of integrated microsystems. Development of a complete microsystem containing sensors and actuators using Silicon On Glass (SOG) MEMS process. Basic E/D MOS circuits chips will designed and simulated but will not be fabricated. Fabricated MEMS chips will be tested.

• Dean M Aslam

Advertisements